New thermally crosslinkable electron-beam resists: 1. Itaconic anhydride—methyl methacrylate copolymers
2007 ◽
Vol 72
(12)
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pp. 1507-1514
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1990 ◽
Vol 41
(1112)
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pp. 2705-2710
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1991 ◽
Vol 27
(2)
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pp. 165-170
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1992 ◽
Vol 46
(9)
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pp. 1631-1638
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Keyword(s):
2011 ◽
Vol 84
(12)
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pp. 2127-2130
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2010 ◽
Vol 349
(1-2)
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pp. 279-286
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