A novel lateral shearing interferometer and its anti-vibration characteristic for on-machine precision surface measurement
2009 ◽
Vol 47
(9)
◽
pp. 926-934
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2014 ◽
Vol 31
(3)
◽
pp. 199-205
2016 ◽
pp. 721-730
Keyword(s):
2008 ◽
Vol 52
(4)
◽
pp. 1004-1009
◽
Keyword(s):