80 K cryogenic stage for ice lithography

Micro and Nano Engineering ◽

10.1016/j.mne.2021.100101 ◽

2021 ◽

pp. 100101

Author(s):

Rubaiyet I. Haque ◽

Affan K. Waafi ◽

Kim Jaemin ◽

Danick Briand ◽

Anpan Han

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