Silicon microelement vibration testing using conventional and heterodyned time-average interferometry with automated temporal and spatial phase stepping
2009 ◽
Vol 47
(3-4)
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pp. 504-511
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Keyword(s):
2008 ◽
Vol 14
(4)
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pp. 520-525
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Keyword(s):
1995 ◽
Vol 23
(5)
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pp. 343-354
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Keyword(s):
2004 ◽
Vol 51
(10)
◽
pp. 1749-1764
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1998 ◽
Vol 33
(2)
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pp. 105-125
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Keyword(s):
1995 ◽
Vol 6
(9)
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pp. 1250-1259
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Keyword(s):
Keyword(s):