Thickness shear SMR resonator based on Yttrium-doped AlN for high sensitive liquid sensors

2021 ◽  
pp. 113238
Author(s):  
F. Laidoudi ◽  
F. Kanouni ◽  
A. Assali ◽  
C. Caliendo ◽  
S. Amara ◽  
...  
Keyword(s):  
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