Finite-element modelling and simulation on frequency characteristics of the silicon beam resonator attached to an E-type round diaphragm for measuring the concentrated force

1997 ◽  
Vol 63 (3) ◽  
pp. 169-176 ◽  
Author(s):  
Shangchun Fan ◽  
Guangyu Liu ◽  
Man Hyung Lee
Sign in / Sign up

Export Citation Format

Share Document