Finite-element modelling and simulation on frequency characteristics of the silicon beam resonator attached to an E-type round diaphragm for measuring the concentrated force
1997 ◽
Vol 63
(3)
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pp. 169-176
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2003 ◽
Vol 16
(6)
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pp. 479-492
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2006 ◽
Vol 23
(3)
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pp. 250-342
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2013 ◽
Vol 12
(4)
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pp. 264-275
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Keyword(s):
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2007 ◽
Vol 5
(1)
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pp. 65-71
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2004 ◽
Vol 21
(1)
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pp. 23-52
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Keyword(s):