Optimized friction drive controller for a multi-DOF ultrasonic nanopositioner

Proceedings 2003 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM 2003) ◽

10.1109/aim.2003.1225533 ◽

2004 ◽

Author(s):

A. Ferreira ◽

J.-G. Fontaine

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