Interconnect constraints on BEOL manufacturing

10th Annual IEEE/SEMI. Advanced Semiconductor Manufacturing Conference and Workshop. ASMC 99 Proceedings (Cat. No.99CH36295) ◽

10.1109/asmc.1999.798251 ◽

2003 ◽

Author(s):

R. Mangaser ◽

C. Mark ◽

K. Rose

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