Minimizing Charging Potential during Passivation Etch

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529054 ◽

2008 ◽

Author(s):

Yue Kok Hong Kenneth ◽

Tay Chin Tiong ◽

Se Kwang Leong James ◽

Goh Boon Kiat

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