2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference
Latest Publications

TOTAL DOCUMENTS

93

(FIVE YEARS 0)

H-INDEX

5

(FIVE YEARS 0)

Published By IEEE

9781424419647

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Advanced method to monitor design-process marginality for 65nm node and beyond

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4528996 ◽

2008 ◽

Author(s):

Hermes Liu ◽

Crockett Huang ◽

S F Tzou ◽

Chris Young ◽

David Tsui ◽

...

Keyword(s):

Design Process ◽

Advanced Method

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Characterization of Static-dissipative Ceramics for ESD and Contamination Control Purposes

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529029 ◽

2008 ◽

Author(s):

Qiang Zhao ◽

Wayne C. Boone ◽

Raymond H. Bryden ◽

Oh-Hun Kwon

Keyword(s):

Contamination Control

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Minimizing Charging Potential during Passivation Etch

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529054 ◽

2008 ◽

Author(s):

Yue Kok Hong Kenneth ◽

Tay Chin Tiong ◽

Se Kwang Leong James ◽

Goh Boon Kiat

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Real-time estimation and control of CD uniformity in lithography

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529026 ◽

2008 ◽

Author(s):

Arthur Tay

Keyword(s):

Real Time ◽

Time Estimation ◽

Real Time Estimation ◽

Estimation And Control ◽

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Yield Optimization with Model Based DFM

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529032 ◽

2008 ◽

Author(s):

Artur Balasinski ◽

Fedor Pikus ◽

Jan Bielawski

Keyword(s):

Yield Optimization ◽

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Simulation on A Novel Ga-doped Phase Change Memory for Next Generation Embedded Non-Volatile Memory Application

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529004 ◽

2008 ◽

Author(s):

Xiu-Lan Cheng ◽

Wen Yin ◽

Zhi-Gang Feng ◽

Tian-Yi Liang

Keyword(s):

Phase Change ◽

Phase Change Memory ◽

Next Generation ◽

Non Volatile Memory ◽

Volatile Memory ◽

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90nm Games Processor Wafer to Module Power Yield Optimization

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529050 ◽

2008 ◽

Author(s):

Raymond Mallette ◽

Brad Rawlins

Keyword(s):

Yield Optimization ◽

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Lowering Cost of Ownership for Lithography Equipment

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529046 ◽

2008 ◽

Author(s):

Clarence Ademu-John ◽

Christopher Conley

Keyword(s):

Cost Of Ownership

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SEM-based methodology for root cause analysis of wafer edge and bevel defects

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4528998 ◽

2008 ◽

Author(s):

Ronnie Porat ◽

Kfir Dotan ◽

Shirley Hemar ◽

Lior Levin ◽

Ken Li ◽

...

Keyword(s):

Root Cause Analysis ◽

Cause Analysis ◽

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A Novel Advanced Process Control for Semiconductor Manufacturing: Dual Proximate Inverse System Feedback Control

2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference ◽

10.1109/asmc.2008.4529023 ◽

2008 ◽

Author(s):

Sheng Hua ◽

Xiu-Lan Cheng ◽

Tong-Dan Jin

Keyword(s):

Feedback Control ◽

Process Control ◽

Semiconductor Manufacturing ◽

Inverse System ◽

Advanced Process Control

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