Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities

2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) ◽

10.1109/asmc51741.2021.9435730 ◽

2021 ◽

Author(s):

Christian Flechsig ◽

Jacob Lohmer ◽

Rainer Lasch ◽

Benjamin Zettler ◽

Germar Scheider ◽

...

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