2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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9781728186450
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Product Yield Enhancement by Spacer Thickness Variation Reduction

2021 ◽  
Author(s):  
Ritesh Ray Chaudhuri ◽  
William Simpson ◽  
Daniel Fedor ◽  
Prabhakar Bharatan ◽  
Joseph Thompson ◽  
...  
Keyword(s):  
Product Yield ◽  
Yield Enhancement ◽  
Thickness Variation ◽  
Variation Reduction ◽  
Spacer Thickness

scholarly journals Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities

2021 ◽  
Author(s):  
Christian Flechsig ◽  
Jacob Lohmer ◽  
Rainer Lasch ◽  
Benjamin Zettler ◽  
Germar Scheider ◽  
...  

Fab Fingerprint for Proactive Yield Management : YE: Yield Enhancement/Learning

2021 ◽  
Author(s):  
David Gross ◽  
Katherine Gramling ◽  
Prasad L. Bachiraju
Keyword(s):  
Yield Management ◽  
Yield Enhancement

One-chamber workflow for STEM examination of EBIRCH-localized defects : YE: Yield Enhancement/Learning

2021 ◽  
Author(s):  
Greg Johnson ◽  
Fabian Perez-Willard ◽  
Matthew Andrew ◽  
Luyang Han ◽  
Vignesh Viswanathan ◽  
...  
Keyword(s):  
Yield Enhancement ◽  
Localized Defects

AI Solution for Metrology Recipe Automation

2021 ◽  
Author(s):  
Congshu Zhou ◽  
Zheng Zou ◽  
Fang Li ◽  
Seng Keat Lim ◽  
Jason Khaw ◽  
...  

Width Walk Control in 3D NAND Staircase Structure Etching

2021 ◽  
Author(s):  
Ching-Hung Hsiao ◽  
Chen-Yu Cheng ◽  
Hong-Ji Lee ◽  
Nan-Tzu Lian ◽  
Tzung-Ting Han ◽  
...  
Keyword(s):  
Staircase Structure

Physical and Electrical Characterization of Deep Trench Isolation in Bulk Silicon and SOI Substrates

2021 ◽  
Author(s):  
Moshe Agam ◽  
Rick Jerome ◽  
Lahcen Boukhanfra ◽  
Masaichi Eda ◽  
Lan Su ◽  
...  
Keyword(s):  
Electrical Characterization ◽  
Bulk Silicon ◽  
Deep Trench ◽  
Trench Isolation ◽  
Soi Substrates

Line width roughness (LWR) improvement and queue time elimination by a chlorine-based process in pitch doubling for improving throughput

2021 ◽  
Author(s):  
Jeff J. Ye ◽  
Benjamin B. Ye ◽  
Tom Esry ◽  
Ketan Deshpande ◽  
Doug Chafe ◽  
...  
Keyword(s):  
Line Width
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