2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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Product Yield Enhancement by Spacer Thickness Variation Reduction

2021 ◽  
Author(s):  
Ritesh Ray Chaudhuri ◽  
William Simpson ◽  
Daniel Fedor ◽  
Prabhakar Bharatan ◽  
Joseph Thompson ◽  
...  
Keyword(s):  
Product Yield ◽  
Yield Enhancement ◽  
Thickness Variation ◽  
Variation Reduction ◽  
Spacer Thickness

scholarly journals Automated and Optimized Lot-To-Order Matching in 300 mm Semiconductor Facilities

2021 ◽  
Author(s):  
Christian Flechsig ◽  
Jacob Lohmer ◽  
Rainer Lasch ◽  
Benjamin Zettler ◽  
Germar Scheider ◽  
...  

One-chamber workflow for STEM examination of EBIRCH-localized defects : YE: Yield Enhancement/Learning

2021 ◽  
Author(s):  
Greg Johnson ◽  
Fabian Perez-Willard ◽  
Matthew Andrew ◽  
Luyang Han ◽  
Vignesh Viswanathan ◽  
...  
Keyword(s):  
Yield Enhancement ◽  
Localized Defects

AI Solution for Metrology Recipe Automation

2021 ◽  
Author(s):  
Congshu Zhou ◽  
Zheng Zou ◽  
Fang Li ◽  
Seng Keat Lim ◽  
Jason Khaw ◽  
...  

Width Walk Control in 3D NAND Staircase Structure Etching

2021 ◽  
Author(s):  
Ching-Hung Hsiao ◽  
Chen-Yu Cheng ◽  
Hong-Ji Lee ◽  
Nan-Tzu Lian ◽  
Tzung-Ting Han ◽  
...  
Keyword(s):  
Staircase Structure
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