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Elimination of Low Yield with 3–9 O’clock Signature through Optimization of CMP Cleaner unit Brush Gap
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
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10.1109/asmc51741.2021.9435734
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2021
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Author(s):
Gerardo Gerry Dizon
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Jack Lim
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Vincent Ngo
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Ming Yao Ho
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