Fabrication of a novel cantilever-based device by release the stress in a reliable way

2015 16th International Conference on Electronic Packaging Technology (ICEPT) ◽

10.1109/icept.2015.7236786 ◽

2015 ◽

Author(s):

Shuaipeng Wang ◽

Jinling Yang ◽

Yanning Chen ◽

Haifeng Zhang ◽

Dongyan Zhao

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