H/sup +/ implantation in Si for the void cut SOI manufacturing

Proceedings of 11th International Conference on Ion Implantation Technology ◽

10.1109/iit.1996.586115 ◽

2002 ◽

Author(s):

T. Hara ◽

Y. Kakizaki ◽

S. Oshima ◽

T. Kihana ◽

T. Kitamura ◽

...

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