Energy enhancement on NV-GSD-HE

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) ◽

10.1109/iit.2000.924174 ◽

2003 ◽

Author(s):

H. Kariya ◽

K. Inada ◽

M. Tsukihara ◽

M. Sugitani ◽

Y. Murakami

Download Full-text