Effects of Pre-amorphization Thickness and Carbon Implantation on NiPt/Si Silicidation Process

2018 22nd International Conference on Ion Implantation Technology (IIT) ◽

10.1109/iit.2018.8807963 ◽

2018 ◽

Author(s):

Laurent Lachal ◽

Fabrice Nemouchi ◽

Frederic Mazen ◽

Philippe Rodriguez ◽

Magali Gregoire ◽

...

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