A self-aligned airgap interconnect scheme

2009 IEEE International Interconnect Technology Conference ◽

10.1109/iitc.2009.5090367 ◽

2009 ◽

Author(s):

Hsien-Wei Chen ◽

Shin-Puu Jeng ◽

Hao-Yi Tsai ◽

Yu-Wen Liu ◽

Hsiu-Ping Wei ◽

...

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