Fluoropolymer platforms for 157 nm resist applications

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) ◽

10.1109/imnc.2001.984193 ◽

2002 ◽

Author(s):

H. Ito ◽

G.M. Wallraff ◽

N. Fender ◽

P.J. Brock ◽

H.D. Truong ◽

...

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