Correlation between printability and visibility of defects in EUV mask blanks

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268754 ◽

2004 ◽

Author(s):

M. Ito ◽

Y. Tezuka ◽

T. Terasawa ◽

T. Tomie

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