Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference

Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268751 ◽

2004 ◽

Author(s):

H. Konno ◽

T. Oseki ◽

T. Kanayama ◽

K. Hayashi

Keyword(s):

Free Radical ◽

Ion Beams ◽

Negative Ion ◽

Spatial Profile

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AFM cantilever array for parallel lithography of quantum devices

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268783 ◽

2004 ◽

Cited By ~ 1

Author(s):

K. Kakushima ◽

M. Watanabe ◽

K. Shimamoto ◽

T. Gouda ◽

M. Ataka ◽

...

Keyword(s):

Quantum Devices ◽

Cantilever Array ◽

Afm Cantilever

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Progress of a laser-produced-plasma light source for EUV lithography

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268753 ◽

2004 ◽

Author(s):

H. Komori ◽

T. Abe ◽

T. Suganuma ◽

Y. Imai ◽

H. Someya ◽

...

Keyword(s):

Light Source ◽

Euv Lithography ◽

Laser Produced Plasma

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Correlation between printability and visibility of defects in EUV mask blanks

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268754 ◽

2004 ◽

Cited By ~ 1

Author(s):

M. Ito ◽

Y. Tezuka ◽

T. Terasawa ◽

T. Tomie

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Electron cyclotron resonance-reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH/sub 4//H/sub 2//Ar and O/sub 2/ with constant Ar flow

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268780 ◽

2004 ◽

Author(s):

N. Haneji ◽

T. Ide ◽

Y. Awa ◽

T. Arakawa ◽

K. Tada ◽

...

Keyword(s):

Cyclotron Resonance ◽

Multilayer Structure ◽

Electron Cyclotron Resonance ◽

Reactive Ion Etching ◽

Electron Cyclotron ◽

Ion Etching ◽

Cyclic Injection

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Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268746 ◽

2004 ◽

Author(s):

A.T. Cho ◽

F.M. Pan ◽

C.W. Yen ◽

J.Y. Chen ◽

Y.J. Chen ◽

...

Keyword(s):

Thin Film ◽

Self Assembly ◽

Nanoporous Silica ◽

Silica Thin Film ◽

Low K

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Measurement of shallow dopant profile using scanning capacitance microscopy

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268768 ◽

2004 ◽

Author(s):

W. Goragot ◽

M. Takai

Keyword(s):

Scanning Capacitance Microscopy ◽

Dopant Profile

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Developed on-chip cell sorting system based on an analysis of microscopic image and impact-free sorting for living cells

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268777 ◽

2004 ◽

Author(s):

K. Takahashi ◽

A. Hattori ◽

I. Suzuki ◽

T. Ichiki ◽

K. Yasuda

Keyword(s):

Cell Sorting ◽

Living Cells ◽

Microscopic Image ◽

On Chip ◽

Sorting System

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Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268784 ◽

2004 ◽

Author(s):

K. Kuwabara ◽

M. Ogino ◽

S. Motowaki ◽

A. Miyauchi

Keyword(s):

Fluorescence Measurement

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Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268778 ◽

2004 ◽

Author(s):

Hoon-Sung Choi ◽

Chang-Taeg Seo ◽

Young-Min Kim ◽

Jang-Kyoo Shin ◽

Pyung Choi ◽

...

Keyword(s):

Thermal Isolation ◽

Isolation Layer ◽

Biochemical Reactor

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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Japan Soc. Of Appl. Phys

Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams

AFM cantilever array for parallel lithography of quantum devices

Progress of a laser-produced-plasma light source for EUV lithography

Correlation between printability and visibility of defects in EUV mask blanks

Electron cyclotron resonance-reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH/sub 4//H/sub 2//Ar and O/sub 2/ with constant Ar flow

Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

Measurement of shallow dopant profile using scanning capacitance microscopy

Developed on-chip cell sorting system based on an analysis of microscopic image and impact-free sorting for living cells

Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology

Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology ConferenceLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Japan Soc. Of Appl. Phys

Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams

AFM cantilever array for parallel lithography of quantum devices

Progress of a laser-produced-plasma light source for EUV lithography

Correlation between printability and visibility of defects in EUV mask blanks

Electron cyclotron resonance-reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH/sub 4//H/sub 2//Ar and O/sub 2/ with constant Ar flow

Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

Measurement of shallow dopant profile using scanning capacitance microscopy

Developed on-chip cell sorting system based on an analysis of microscopic image and impact-free sorting for living cells

Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology

Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
Latest Publications