Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference

AFM cantilever array for parallel lithography of quantum devices

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268783 ◽

2004 ◽

Cited By ~ 1

Author(s):

K. Kakushima ◽

M. Watanabe ◽

K. Shimamoto ◽

T. Gouda ◽

M. Ataka ◽

...

Keyword(s):

Quantum Devices ◽

Cantilever Array ◽

Afm Cantilever

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Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268751 ◽

2004 ◽

Author(s):

H. Konno ◽

T. Oseki ◽

T. Kanayama ◽

K. Hayashi

Keyword(s):

Free Radical ◽

Ion Beams ◽

Negative Ion ◽

Spatial Profile

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Correlation between printability and visibility of defects in EUV mask blanks

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268754 ◽

2004 ◽

Cited By ~ 1

Author(s):

M. Ito ◽

Y. Tezuka ◽

T. Terasawa ◽

T. Tomie

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Progress of a laser-produced-plasma light source for EUV lithography

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268753 ◽

2004 ◽

Author(s):

H. Komori ◽

T. Abe ◽

T. Suganuma ◽

Y. Imai ◽

H. Someya ◽

...

Keyword(s):

Light Source ◽

Euv Lithography ◽

Laser Produced Plasma

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Electron cyclotron resonance-reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH/sub 4//H/sub 2//Ar and O/sub 2/ with constant Ar flow

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268780 ◽

2004 ◽

Author(s):

N. Haneji ◽

T. Ide ◽

Y. Awa ◽

T. Arakawa ◽

K. Tada ◽

...

Keyword(s):

Cyclotron Resonance ◽

Multilayer Structure ◽

Electron Cyclotron Resonance ◽

Reactive Ion Etching ◽

Electron Cyclotron ◽

Ion Etching ◽

Cyclic Injection

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Developed on-chip cell sorting system based on an analysis of microscopic image and impact-free sorting for living cells

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268777 ◽

2004 ◽

Author(s):

K. Takahashi ◽

A. Hattori ◽

I. Suzuki ◽

T. Ichiki ◽

K. Yasuda

Keyword(s):

Cell Sorting ◽

Living Cells ◽

Microscopic Image ◽

On Chip ◽

Sorting System

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Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268784 ◽

2004 ◽

Author(s):

K. Kuwabara ◽

M. Ogino ◽

S. Motowaki ◽

A. Miyauchi

Keyword(s):

Fluorescence Measurement

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Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268778 ◽

2004 ◽

Author(s):

Hoon-Sung Choi ◽

Chang-Taeg Seo ◽

Young-Min Kim ◽

Jang-Kyoo Shin ◽

Pyung Choi ◽

...

Keyword(s):

Thermal Isolation ◽

Isolation Layer ◽

Biochemical Reactor

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Laser plasma light source based on a gas puff target for EUV metrology applications

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268772 ◽

2004 ◽

Author(s):

H. Fiedorowicz ◽

A. Bartnik ◽

R. Jarocki ◽

J. Kostecki ◽

J. Mikolajczyk ◽

...

Keyword(s):

Light Source ◽

Laser Plasma

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Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference ◽

10.1109/imnc.2003.1268746 ◽

2004 ◽

Author(s):

A.T. Cho ◽

F.M. Pan ◽

C.W. Yen ◽

J.Y. Chen ◽

Y.J. Chen ◽

...

Keyword(s):

Thin Film ◽

Self Assembly ◽

Nanoporous Silica ◽

Silica Thin Film ◽

Low K

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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Japan Soc. Of Appl. Phys

AFM cantilever array for parallel lithography of quantum devices

Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams

Correlation between printability and visibility of defects in EUV mask blanks

Progress of a laser-produced-plasma light source for EUV lithography

Electron cyclotron resonance-reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH/sub 4//H/sub 2//Ar and O/sub 2/ with constant Ar flow

Developed on-chip cell sorting system based on an analysis of microscopic image and impact-free sorting for living cells

Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology

Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

Laser plasma light source based on a gas puff target for EUV metrology applications

Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

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Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology ConferenceLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Japan Soc. Of Appl. Phys

AFM cantilever array for parallel lithography of quantum devices

Spatial profile of neutral free radical beam produced by the method of phot-deionization of negative ion beams

Correlation between printability and visibility of defects in EUV mask blanks

Progress of a laser-produced-plasma light source for EUV lithography

Electron cyclotron resonance-reactive ion etching of InGaAs/InAlAs/InP multilayer structure and GaN by cyclic injection of CH/sub 4//H/sub 2//Ar and O/sub 2/ with constant Ar flow

Developed on-chip cell sorting system based on an analysis of microscopic image and impact-free sorting for living cells

Fluorescence measurement of nanopillars fabricated by high aspect nanoprint technology

Fabrication of a micro-biochemical reactor with thick thermal isolation layer and integrated Pt heater/sensor in the micro-well

Laser plasma light source based on a gas puff target for EUV metrology applications

Patterning of self-assembly surfactant templated nanoporous silica thin film as an ultra low-k dielectric

Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
Latest Publications