Design and experimental verifications of an integrated micro-gyroscope

2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) ◽

10.1109/impact.2011.6117259 ◽

2011 ◽

Author(s):

Sheng-Ren Chiu ◽

Chung-Yang Sue ◽

Shih-Ting Lin ◽

Shih-Chieh Lin ◽

Yu-Wen Hsu ◽

...

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