Optical induce tungsten plug corrosion in CMP process

2010 17th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits ◽

10.1109/ipfa.2010.5532231 ◽

2010 ◽

Author(s):

Re-Long Chiu ◽

Jason Higgins ◽

Sharon Ying ◽

Yajiang Liu ◽

Barry Dick ◽

...

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