Overview of FDSOI technology from substrate to device

2009 International Semiconductor Device Research Symposium ◽

10.1109/isdrs.2009.5378173 ◽

2009 ◽

Author(s):

Bich-Yen Nguyen ◽

Carlos Mazure ◽

Daniel Delprat ◽

Cecile Aulnette ◽

Nicolas Daval ◽

...

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