A 15.5mΩcm>sup/sup<-680V Superjunction MOSFET Reduced On-Resistance by Lateral Pitch Narrowing

2006 IEEE International Symposium on Power Semiconductor Devices & IC's ◽

10.1109/ispsd.2006.1666129 ◽

2006 ◽

Author(s):

W. Saito ◽

I. Omura ◽

S. Aida ◽

S. Koduki ◽

M. Izumisawa ◽

...

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