CD SEM calibration to TEM for accurate metrology of fins in MuGFET devices

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513326 ◽

2005 ◽

Author(s):

G.F. Lorusso ◽

N. Collaert ◽

R. Rooyackers ◽

M. Ercken ◽

I. Pollentier ◽

...

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