ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005.
Latest Publications

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141

(FIVE YEARS 0)

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6

(FIVE YEARS 0)

Published By IEEE

0780391438

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ISSM 2005 sponsoring organizations

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513280 ◽

2005 ◽

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Challenges for inline elemental characterization at 65 nm node and beyond

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513413 ◽

2005 ◽

Author(s):

M. Godwin

Keyword(s):

Elemental Characterization

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Pattern of vertical engineering collaboration between foundry and design service provider

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513378 ◽

2005 ◽

Author(s):

Yea-Huey Su ◽

Ruey-Shan Guo ◽

Chia-Hsien Hsiao

Keyword(s):

Service Provider ◽

Engineering Collaboration

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Study for Realizing Effective Direct Tool-to-Tool Delivery

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513286 ◽

2005 ◽

Author(s):

H. Kondo ◽

M. Harada

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Study on reliability of metal fuse for sub-100nm technology

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513394 ◽

2005 ◽

Author(s):

D. Park ◽

Chang-Suk Hyun ◽

Hyun-Chul Kim ◽

Hyuck-Jin Kang ◽

Kang-Yoon Lee ◽

...

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Evaluate simulation design alternatives for large scale manufacturing systems

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513373 ◽

2005 ◽

Author(s):

L.F. McGinnis ◽

Sheng Xu ◽

Ke Wang

Keyword(s):

Manufacturing Systems ◽

Large Scale ◽

Simulation Design ◽

Design Alternatives

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Breaker page

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513284 ◽

2005 ◽

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Manufacturing operations improvement with loop management

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513289 ◽

2005 ◽

Author(s):

G.R. Chacon ◽

F. Ballejo ◽

S. James ◽

C. Manuel ◽

C. Love ◽

...

Keyword(s):

Manufacturing Operations

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A breakthrough in optimizing throughput and manufacturing efficiency via factory-wide dynamic WIP dispatching in 300mm semiconductor manufacturing

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513291 ◽

2005 ◽

Author(s):

Bo Li ◽

J. Wu ◽

M.P. Herring ◽

C. Mouli

Keyword(s):

Semiconductor Manufacturing ◽

Manufacturing Efficiency

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CD SEM calibration to TEM for accurate metrology of fins in MuGFET devices

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513326 ◽

2005 ◽

Author(s):

G.F. Lorusso ◽

N. Collaert ◽

R. Rooyackers ◽

M. Ercken ◽

I. Pollentier ◽

...

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