Study on reliability of metal fuse for sub-100nm technology

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513394 ◽

2005 ◽

Author(s):

D. Park ◽

Chang-Suk Hyun ◽

Hyun-Chul Kim ◽

Hyuck-Jin Kang ◽

Kang-Yoon Lee ◽

...

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