A novel plasma-based technique for conformal 3D FINFET doping

2012 12th International Workshop on Junction Technology ◽

10.1109/iwjt.2012.6212805 ◽

2012 ◽

Author(s):

K. Han ◽

S. Tang ◽

T. Rockwell ◽

L. Godet ◽

H. Persing ◽

...

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