2012 12th International Workshop on Junction Technology
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9781467312578, 9781467312585, 9781467312561
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Planar and nanowire Schottky barrier MOSFETs on SOI with NiSi and epitaxial NiSi2 contacts

2012 ◽  
Author(s):  
Q. T. Zhao ◽  
L. Knoll ◽  
A. Schafer ◽  
S. Trellenkamp ◽  
K. K. Bourdelle ◽  
...  
Keyword(s):  
Schottky Barrier

A novel plasma-based technique for conformal 3D FINFET doping

2012 ◽  
Author(s):  
K. Han ◽  
S. Tang ◽  
T. Rockwell ◽  
L. Godet ◽  
H. Persing ◽  
...  

Scanning spreading resistance microscopy for carrier profiling beyond 32nm node

2012 ◽  
Author(s):  
J. Mody ◽  
G. Zschatzsch ◽  
S. Kolling ◽  
A. De Keersgieter ◽  
G. Eneman ◽  
...  
Keyword(s):  
Spreading Resistance

Microprobe metrology for direct sheet resistance and mobility characterization

2012 ◽  
Author(s):  
P. F. Nielsen ◽  
D. H. Petersen ◽  
Rong Lin ◽  
A. Jensen ◽  
H. H. Henrichsen ◽  
...  
Keyword(s):  
Sheet Resistance
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