Ultrasound barrier based on packaged micromachined membrane resonators

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472599 ◽

2005 ◽

Author(s):

M. Hornung ◽

R. Frey ◽

O. Brand ◽

H. Baltes ◽

C. Hafner

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