Proceedings IEEE Micro Electro Mechanical Systems. 1995
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77

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Ultrasound barrier based on packaged micromachined membrane resonators

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472599 ◽

2005 ◽

Author(s):

M. Hornung ◽

R. Frey ◽

O. Brand ◽

H. Baltes ◽

C. Hafner

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Novel functionality using micro-gaseous devices

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472551 ◽

2005 ◽

Author(s):

H.C. Nathanson ◽

I. Liberman ◽

C. Freidhoff

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Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472581 ◽

2005 ◽

Author(s):

Y. Hirata ◽

H. Okuyama ◽

S. Ogino ◽

T. Numazawa ◽

H. Takada

Keyword(s):

Ultrasonic Transducers ◽

Piezoelectric Composites ◽

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Optical tactile sensor using surface-emitting laser

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472575 ◽

2005 ◽

Author(s):

E. Yamamoto ◽

S. Hashimoto ◽

M. Ito ◽

I. Komazaki ◽

K. Yanagisawa

Keyword(s):

Tactile Sensor ◽

Surface Emitting Laser

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Groove depth uniformization in [110] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472546 ◽

2005 ◽

Author(s):

K. Ohwada ◽

Y. Negoro ◽

Y. Konaka ◽

T. Oguchi

Keyword(s):

Ultrasonic Wave ◽

Groove Depth ◽

Anisotropic Etching

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System design for cooperative control of arrayed microactuators

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472601 ◽

2005 ◽

Author(s):

S. Konishi ◽

H. Fujita

Keyword(s):

System Design ◽

Cooperative Control

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Nonlinearity and hysteresis of resonant strain gauges

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472588 ◽

2005 ◽

Author(s):

Chengqun Gui ◽

R. Legtenberg ◽

H.A.C. Tilmans ◽

J.H.J. Fluitman ◽

M. Elwenspoek

Keyword(s):

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A quantitative analysis of Scratch Drive Actuator using buckling motion

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472603 ◽

2005 ◽

Author(s):

T. Akiyama ◽

H. Fujita

Keyword(s):

Quantitative Analysis

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Measurements of physical parameters with ultrasound and microdiaphragms

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472539 ◽

2005 ◽

Author(s):

W.K. Schomburg ◽

M. Vitt ◽

W. Bacher ◽

M.W. Borner ◽

W. Menz

Keyword(s):

Physical Parameters

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2-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472604 ◽

2005 ◽

Author(s):

Y. Ohtuka ◽

H. Nishikawa ◽

T. Koumura ◽

T. Hattori

Keyword(s):

Degrees Of Freedom ◽

Optical Scanner

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