Plasma induced damage from via etching in pMOSFETs

7th International Symposium on Plasma- and Process-Induced Damage ◽

10.1109/ppid.2002.1042622 ◽

2003 ◽

Cited By ~ 3

Author(s):

G. Cellere ◽

M.G. Valentini ◽

A. Baraldo ◽

A. Paccagnella