Highly Flexible SU-8 Microstructures

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300198 ◽

2007 ◽

Author(s):

J. P. F. Spratley ◽

M. C. L. Ward ◽

P. S. Hall

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