TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Latest Publications

TOTAL DOCUMENTS

657

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

1424408415

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Non-Contact Detection of Free Flying Nanoliter Droplets

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300239 ◽

2007 ◽

Cited By ~ 3

Author(s):

A. Ernst ◽

W. Streule ◽

R. Zengerle ◽

P. Koltay

Keyword(s):

Contact Detection

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Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300400 ◽

2007 ◽

Cited By ~ 1

Author(s):

Kuniharu Takei ◽

Takahiro Kawashima ◽

Hidekuni Takao ◽

Kazuaki Sawada ◽

Makoto Ishida

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Nitrogen Doped Polcrystalline 3C-Sic Films Deposited by LPCVD for MEMS Applications

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300179 ◽

2007 ◽

Cited By ~ 2

Author(s):

X. A. Fu ◽

J. Trevino ◽

S. Noh ◽

C. A. Zorman ◽

M. Mehregany

Keyword(s):

Nitrogen Doped ◽

Sic Films

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Highly Flexible SU-8 Microstructures

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300198 ◽

2007 ◽

Author(s):

J. P. F. Spratley ◽

M. C. L. Ward ◽

P. S. Hall

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Design and Fabrication of Micromachined Silicon Based Mid Infrared Multilenses for Gas Sensing Applications

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300695 ◽

2007 ◽

Cited By ~ 2

Author(s):

J. Fonollosa ◽

R. Rubio ◽

J. Hildenbrand ◽

S. Hartwig ◽

J. Santander ◽

...

Keyword(s):

Gas Sensing ◽

Mid Infrared ◽

Sensing Applications ◽

Silicon Based

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Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300568 ◽

2007 ◽

Cited By ~ 1

Author(s):

D. Sameoto ◽

S.-W. Lee ◽

M. Parameswaran

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Realtime 3D Stress Measurement in Curing Epoxy Packaging

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300575 ◽

2007 ◽

Cited By ~ 2

Author(s):

J. Richter ◽

A. Hyldgard ◽

K. Birkelund ◽

O. Hansen ◽

E.V. Thomsen

Keyword(s):

Stress Measurement

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A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300320 ◽

2007 ◽

Cited By ~ 6

Author(s):

L. Wu ◽

H. Xie

Keyword(s):

Vertical Displacement ◽

Lateral Shift ◽

Electrothermal Actuator

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Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300125 ◽

2007 ◽

Cited By ~ 3

Author(s):

GK Lau ◽

T Chu Duc ◽

JFL Goosen ◽

PM Sarro ◽

F van Keulen

Keyword(s):

Thermal Actuator ◽

Power Efficient

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An Implantable Active Microport Based on a Self-Priming High-Performance Two-Stage Micropump

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300540 ◽

2007 ◽

Cited By ~ 1

Author(s):

A. Geipel ◽

F. Goldschmidtboing ◽

A. Doll ◽

S. Nadir ◽

P. Jantscheff ◽

...

Keyword(s):

High Performance ◽

Two Stage

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems ConferenceLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Non-Contact Detection of Free Flying Nanoliter Droplets

Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs

Nitrogen Doped Polcrystalline 3C-Sic Films Deposited by LPCVD for MEMS Applications

Highly Flexible SU-8 Microstructures

Design and Fabrication of Micromachined Silicon Based Mid Infrared Multilenses for Gas Sensing Applications

Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators

Realtime 3D Stress Measurement in Curing Epoxy Packaging

A Lateral-Shift-Free and Large-Vertical-Displacement Electrothermal Actuator for Scanning Micromirror/Lens

Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8

An Implantable Active Microport Based on a Self-Priming High-Performance Two-Stage Micropump

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
Latest Publications