TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
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657
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16
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Published By IEEE

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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Non-Contact Detection of Free Flying Nanoliter Droplets

2007 ◽  
Author(s):  
A. Ernst ◽  
W. Streule ◽  
R. Zengerle ◽  
P. Koltay
Keyword(s):  
Contact Detection

Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs

2007 ◽  
Author(s):  
Kuniharu Takei ◽  
Takahiro Kawashima ◽  
Hidekuni Takao ◽  
Kazuaki Sawada ◽  
Makoto Ishida

Nitrogen Doped Polcrystalline 3C-Sic Films Deposited by LPCVD for MEMS Applications

2007 ◽  
Author(s):  
X. A. Fu ◽  
J. Trevino ◽  
S. Noh ◽  
C. A. Zorman ◽  
M. Mehregany
Keyword(s):  
Nitrogen Doped ◽  
Sic Films

Highly Flexible SU-8 Microstructures

2007 ◽  
Author(s):  
J. P. F. Spratley ◽  
M. C. L. Ward ◽  
P. S. Hall

scholarly journals Realtime 3D Stress Measurement in Curing Epoxy Packaging

2007 ◽  
Author(s):  
J. Richter ◽  
A. Hyldgard ◽  
K. Birkelund ◽  
O. Hansen ◽  
E.V. Thomsen
Keyword(s):  
Stress Measurement

Power Efficient V-Shape Electro-Thermal Actuator using Constrained SU-8

2007 ◽  
Author(s):  
GK Lau ◽  
T Chu Duc ◽  
JFL Goosen ◽  
PM Sarro ◽  
F van Keulen
Keyword(s):  
Thermal Actuator ◽  
Power Efficient

An Implantable Active Microport Based on a Self-Priming High-Performance Two-Stage Micropump

2007 ◽  
Author(s):  
A. Geipel ◽  
F. Goldschmidtboing ◽  
A. Doll ◽  
S. Nadir ◽  
P. Jantscheff ◽  
...  
Keyword(s):  
High Performance ◽  
Two Stage
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