Si Micro Probe and SiO2 Micro Tube Array Integrated with nMOSFETs

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300400 ◽

2007 ◽

Cited By ~ 1

Author(s):

Kuniharu Takei ◽

Takahiro Kawashima ◽

Hidekuni Takao ◽

Kazuaki Sawada ◽

Makoto Ishida

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