Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference ◽

10.1109/sensor.2007.4300568 ◽

2007 ◽

Cited By ~ 1

Author(s):

D. Sameoto ◽

S.-W. Lee ◽

M. Parameswaran

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