Methodology for predictive calibration of TCAD simulators

SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest ◽

10.1109/sispad.1997.621366 ◽

2002 ◽

Author(s):

G. Le Carval ◽

P. Scheiblin ◽

D. Poncet ◽

P. Rivallin

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