Using spectroellipsometry to examine multilayer gratings for sensors and photodetectors

2000 International Semiconductor Conference. 23rd Edition. CAS 2000 Proceedings (Cat. No.00TH8486) ◽

10.1109/smicnd.2000.889117 ◽

2002 ◽

Author(s):

N.L. Dmitruk ◽

O.I. Mayeva ◽

S.V. Mamykin ◽

O.B. Yastrubchak ◽

M. Klopfleisch

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