Tensile strained Ge membranes

2014 15th International Conference on Ultimate Integration on Silicon (ULIS) ◽

10.1109/ulis.2014.6813917 ◽

2014 ◽

Author(s):

V. A. Shah ◽

O. Trushkevych ◽

M. Myronov ◽

S. Rhead ◽

J. Halpin ◽

...

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