CVD aluminum for submicron VLSI metallization

1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference ◽

10.1109/vmic.1991.152951 ◽

2002 ◽

Author(s):

W.Y.-C. Lai ◽

K.P. Cheung ◽

D.P. Favreau ◽

C. Case ◽

R. Liu ◽

...

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