Multilevel interconnects using Al CVD

1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference ◽

10.1109/vmic.1991.153008 ◽

2002 ◽

Author(s):

S. Wolff ◽

J. Chang ◽

J. Estabil ◽

S. Luce ◽

E. Granneman

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