Improving 130nm node patterning using inverse lithography techniques for an analog process

Optical Microlithography XXXI ◽

10.1117/12.2297219 ◽

2018 ◽

Author(s):

Can Duan ◽

Scott Jessen ◽

David Ziger ◽

Mizuki Watanabe ◽

Steve Prins ◽

...

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