Freeform mask optimization using advanced image based M3D inverse lithography and 3D-NAND full chip opc application

Optical Microlithography XXXI ◽

10.1117/12.2297397 ◽

2018 ◽

Author(s):

Sam Liu ◽

Jingjing Liu ◽

Andy Yang ◽

Moran Guo ◽

Jun He ◽

...

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