Dual tone sub-resolution assist features to improve corner rounding

Optical Microlithography XXXIII ◽

10.1117/12.2550834 ◽

2020 ◽

Author(s):

Cheng Chi ◽

Hao Tang ◽

Oseo Park ◽

Jing Xue ◽

Jing Guo ◽

...

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