Soft x-ray projection lithography system design and cost analysis

1992 ◽  
Author(s):  
Natale M. Ceglio ◽  
Andrew M. Hawryluk
Keyword(s):  
Cost Analysis ◽  
System Design ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection ◽  
Lithography System

Radiation hardness of molybdenum silicon multilayers designed for use in a soft-x-ray projection lithography system

1993 ◽  
Vol 32 (34) ◽  
pp. 6991 ◽  
Author(s):  
David P. Gaines ◽  
Ronnie C. Spitzer ◽  
Natale M. Ceglio ◽  
Michael Krumrey ◽  
Gerhard Ulm
Keyword(s):  
Radiation Hardness ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection ◽  
Lithography System

Characterization of AZ PN114 resist for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 7044 ◽  
Author(s):  
K. Early ◽  
D. M. Tennant ◽  
D. Y. Jeon ◽  
P. P. Mulgrew ◽  
A. A. MacDowell ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Resist performance in 5nm and 13nm soft X-ray projection lithography

1995 ◽  
Vol 27 (1-4) ◽  
pp. 317-320
Author(s):  
Hiroaki Oizumi ◽  
Masayuki Ohtani ◽  
Yoshio Yamashita ◽  
Katsuhiko Murakami ◽  
Hiroshi Nagata ◽  
...  
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

The Role of Solid State Lasers in Soft-X-Ray Projection Lithography

1993 ◽  
pp. 247-261
Author(s):  
W. T. Silfvast ◽  
M. C. Richardson ◽  
H. Bender ◽  
A. Hanzo ◽  
V. Yanovsky ◽  
...  
Keyword(s):  
Solid State ◽  
Solid State Lasers ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Reflection masks for soft x-ray projection lithography

1995 ◽  
Author(s):  
Masaaki Ito ◽  
Takashi Soga ◽  
Hiromasa Yamanashi ◽  
Taro Ogawa
Keyword(s):  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Multilayer mirror technology for soft-x-ray projection lithography

1993 ◽  
Vol 32 (34) ◽  
pp. 6952 ◽  
Author(s):  
D. G. Stearns ◽  
R. S. Rosen ◽  
S. P. Vernon
Keyword(s):  
X Ray ◽  
Multilayer Mirror ◽  
Projection Lithography ◽  
Ray Projection
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