Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
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Published By American Vacuum Society

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High-temperature electrostatic chuck for nonvolatile materials dry etch

2005 ◽  
Vol 23 (1) ◽  
pp. 113 ◽  
Author(s):  
S. Kanno ◽  
M. Edamura ◽  
K. Yoshioka ◽  
R. Nishio ◽  
S. Kanai ◽  
...  
Keyword(s):  
High Temperature ◽  
Dry Etch

Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature

2005 ◽  
Vol 23 (2) ◽  
pp. 395 ◽  
Author(s):  
Marcus A. Worsley ◽  
Stacey F. Bent ◽  
Stephen M. Gates ◽  
Nicholas C. M. Fuller ◽  
Willi Volksen ◽  
...  
Keyword(s):  
Plasma Chemistry ◽  
Plasma Interactions

Narrow cone emission from negative electron affinity photocathodes

2005 ◽  
Vol 23 (6) ◽  
pp. 2758 ◽  
Author(s):  
Zhi Liu ◽  
Yun Sun ◽  
P. Pianetta ◽  
R. F. W. Pease
Keyword(s):  
Electron Affinity ◽  
Negative Electron Affinity

Fabrication and field emission characteristics of high density carbon nanotube microarrays

2005 ◽  
Vol 23 (2) ◽  
pp. 772 ◽  
Author(s):  
C. C. Chuang ◽  
J. H. Huang ◽  
C. C. Lee ◽  
Y. Y. Chang
Keyword(s):  
Carbon Nanotube ◽  
Field Emission ◽  
High Density ◽  
Emission Characteristics

Overlay alignment using optical microscopy and arbitrary surface features

2005 ◽  
Vol 23 (6) ◽  
pp. 3047 ◽  
Author(s):  
Carl Picciotto ◽  
Jun Gao ◽  
Eric Hoarau ◽  
Wei Wu ◽  
Warren Jackson ◽  
...  
Keyword(s):  
Optical Microscopy ◽  
Surface Features

Monolithically integrated circular polarizers with two-layer nano-gratings fabricated by imprint lithography

2005 ◽  
Vol 23 (6) ◽  
pp. 3164 ◽  
Author(s):  
Jian Jim Wang ◽  
Feng Liu ◽  
Xuegong Deng ◽  
Xiaoming Liu ◽  
Lei Chen ◽  
...  
Keyword(s):  
Imprint Lithography ◽  
Monolithically Integrated

High-performance 30-period quantum-dot infrared photodetector

2005 ◽  
Vol 23 (3) ◽  
pp. 1129 ◽  
Author(s):  
Shu-Ting Chou ◽  
Shih-Yen Lin ◽  
Ru-Shang Hsiao ◽  
Jim-Yong Chi ◽  
Jyh-Shyang Wang ◽  
...  
Keyword(s):  
Quantum Dot ◽  
High Performance ◽  
Infrared Photodetector ◽  
Quantum Dot Infrared Photodetector

scholarly journals Topas-based lab-on-a-chip microsystems fabricated by thermal nanoimprint lithography

2005 ◽  
Vol 23 (6) ◽  
pp. 2944 ◽  
Author(s):  
B. Bilenberg ◽  
M. Hansen ◽  
D. Johansen ◽  
V. Özkapici ◽  
C. Jeppesen ◽  
...  
Keyword(s):  
Nanoimprint Lithography ◽  
Lab On A Chip
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