Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
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Published By American Vacuum Society

2327-9877, 0734-211x
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Diamond nanorods

2005 ◽  
Vol 23 (6) ◽  
pp. 2457 ◽  
Author(s):  
O. A. Shenderova ◽  
C. W. Padgett ◽  
Z. Hu ◽  
D. W. Brenner

Molecular beam epitaxial growth of Fe(Si[sub 1−x]Ge[sub x])[sub 2] epilayers

2005 ◽  
Vol 23 (3) ◽  
pp. 1299 ◽  
Author(s):  
R. J. Cottier ◽  
F. Z. Amir ◽  
K. Hossain ◽  
J. B. House ◽  
B. P. Gorman ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Molecular Beam ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth

Mass spectrometry studies of resist trimming processes in HBr∕O[sub 2] and Cl[sub 2]∕O[sub 2] chemistries

2005 ◽  
Vol 23 (1) ◽  
pp. 103 ◽  
Author(s):  
E. Pargon ◽  
O. Joubert ◽  
T. Chevolleau ◽  
G. Cunge ◽  
Songlin Xu ◽  
...  
Keyword(s):  
Mass Spectrometry

Selective growth of vertical ZnO nanowires on ZnO:Ga∕Si[sub 3]N[sub 4]∕SiO[sub 2]∕Si templates

2005 ◽  
Vol 23 (6) ◽  
pp. 2292 ◽  
Author(s):  
Cheng-Liang Hsu ◽  
Shoou-Jinn Chang ◽  
Hui-Chuan Hung ◽  
Yan-Ru Lin ◽  
Tsung-Heng Lu ◽  
...  
Keyword(s):  
Zno Nanowires ◽  
Selective Growth

Nanoscale patterning in application to materials and device structures

2005 ◽  
Vol 23 (6) ◽  
pp. 3132 ◽  
Author(s):  
A. Erbe ◽  
W. Jiang ◽  
Z. Bao ◽  
D. Abusch-Magder ◽  
D. M. Tennant ◽  
...  
Keyword(s):  
Nanoscale Patterning ◽  
Device Structures

Edge-shaped diamond field emission arrays

2005 ◽  
Vol 23 (2) ◽  
pp. 800 ◽  
Author(s):  
R. S. Takalkar ◽  
J. L. Davidson ◽  
W. P. Kang ◽  
A. Wisitsora-at ◽  
D. V. Kerns
Keyword(s):  
Field Emission ◽  
Field Emission Arrays

Silicon carbide based dielectric composites in bilayer sidewall barrier for Cu∕porous ultralow-k interconnects

2005 ◽  
Vol 23 (5) ◽  
pp. 1866 ◽  
Author(s):  
Zhe Chen ◽  
K. Prasad ◽  
N. Jiang ◽  
L. J. Tang ◽  
P. W. Lu ◽  
...  
Keyword(s):  
Silicon Carbide
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