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In0.52Al0.48As/In0.53Ga0.47As higfets using novel 0.2 μm self-aligned T-gate technology
Gallium Arsenide and Related Compounds 1991
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10.1201/9781003069638-55
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2020
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pp. 275-334
Author(s):
Yi-Jen Chan
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Dimitris Pavlidis
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Tim Brock
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