Precise optical surface profilometry using innovative chromatic differential confocal microscopy

2016 ◽  
Vol 41 (24) ◽  
pp. 5660 ◽  
Author(s):  
Liang-Chia Chen ◽  
Duc Trung Nguyen ◽  
Yi-Wei Chang
Author(s):  
D. M. Kane ◽  
G. R. Staib ◽  
N. Naidoo ◽  
A. M. Joyce ◽  
J. R. Rabeau ◽  
...  

SPIE Newsroom ◽  
2014 ◽  
Author(s):  
Quang Duc Pham ◽  
Yoshio Hayasaki

Sign in / Sign up

Export Citation Format

Share Document