Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Grinding, Lapping and Polishing Technologies under Nanometer Scale Working Conditions.

Toshio KASAI; Toshiro DOY

doi:10.2493/jjspe.59.559

Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Grinding, Lapping and Polishing Technologies under Nanometer Scale Working Conditions.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.559 ◽

1993 ◽

Vol 59 (4) ◽

pp. 559-562 ◽

Cited By ~ 1

Author(s):

Toshio KASAI ◽

Toshiro DOY

Keyword(s):

Working Conditions ◽

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Surface Chemistry in Tribology.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.549 ◽

1993 ◽

Vol 59 (4) ◽

pp. 549-554

Author(s):

Shigeyuki MORI

Keyword(s):

Surface Chemistry ◽

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Nano-etching Technology.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.568 ◽

1993 ◽

Vol 59 (4) ◽

pp. 568-571

Author(s):

Iwao MIYAMOTO

Keyword(s):

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Chemical Phenomena and Its Application in Ultraprecision Processing.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.539 ◽

1993 ◽

Vol 59 (4) ◽

pp. 539-542

Author(s):

Nobuo YASUNAGA

Keyword(s):

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Interactions of Ions/Energetic Neutral Particles with Surfaces.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.555 ◽

1993 ◽

Vol 59 (4) ◽

pp. 555-558 ◽

Cited By ~ 1

Author(s):

Fusao SHIMOKAWA

Keyword(s):

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Neutral Particles ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Nanometer Scale Depositions.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.563 ◽

1993 ◽

Vol 59 (4) ◽

pp. 563-567 ◽

Cited By ~ 4

Author(s):

Shaiiro MIYAKE

Keyword(s):

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Models of Processed Surfaces.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.543 ◽

1993 ◽

Vol 59 (4) ◽

pp. 543-548

Author(s):

Takao MURAKAVVA

Keyword(s):

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Physical Reaction

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Special Issue on Nanometer-scale Machining and Processing Technology - From the Viewpoint of Chemical/Physical Reaction on Surfaces. Nanometer-scale Assembly Technology.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.59.572 ◽

1993 ◽

Vol 59 (4) ◽

pp. 572-576

Author(s):

Tadatomo SUGA

Keyword(s):

Processing Technology ◽

Nanometer Scale ◽

Special Issue ◽

Assembly Technology ◽

Physical Reaction

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Preface to the Special Issue on “Nanometer-scale Fabrication Techniques for Evolving MEMS”

IEEJ Transactions on Sensors and Micromachines ◽

10.1541/ieejsmas.139.121 ◽

2019 ◽

Vol 139 (6) ◽

pp. 121-121

Author(s):

Taeko Ando

Keyword(s):

Nanometer Scale ◽

Special Issue

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Editorial for the special issue on advanced processing technology for selected papers from ICFDM2016

Journal of Manufacturing Processes ◽

10.1016/j.jmapro.2017.07.013 ◽

2017 ◽

Vol 28 ◽

pp. 363

Author(s):

Albert Shih ◽

Yinan Lai ◽

Shiv G. Kapoor ◽

Chuanzhen Huang ◽

Fei Tao

Keyword(s):

Processing Technology ◽

Special Issue

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Development and Practical Use of Super Fine-Grain Sintered Carbide(Topics on New Processing Technology,The Present State of Processing Limit and Process Design)

Journal of the Society of Mechanical Engineers ◽

10.1299/jsmemag.80.704_672 ◽

1977 ◽

Vol 80 (704) ◽

pp. 672-673

Author(s):

Syuichiro WAKASA ◽

Susumu YAMAYA

Keyword(s):

Present State ◽

Process Design ◽

Processing Technology ◽

Special Issue ◽

Sintered Carbide ◽

Fine Grain ◽

New Processing

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